Sublimation and vapor deposition

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When the system pressure is below the triple point pressure, direct phase change between solid and vapor can occur. The process whereby solid is vaporized without going through the liquid phase is referred to as sublimation. The process whereby a vapor phase turns to solid is referred to as deposition, which is the opposite process of sublimation.
When the gaseous precursors are absorbed by a heated substrate – where a chemical reaction takes place – the nucleation and lattice incorporation leads to formation of a solid film. This process is referred to as Chemical Vapor Deposition (CVD).